Water Cooling Circulation System

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Water cooling circulation system is an indirect cooling device used for key equipment in semiconductor, microelectronics and other industries. Divided into open system and closed system.

The application range of water cooling circulation system is very wide. Involving all aspects of industrial production, including semiconductors, microelectronics, steam turbine exhaust condensation in thermal power plants, large central air conditioners, coal chemical industry, petrochemical plants, natural gas pipeline cooling and other places, a large amount of process cooling water is used. Clean workshops are required in many product or process production environments. The workshop requires temperature and relative humidity to be maintained within a certain range throughout the year. Some of these production processes generate large amounts of heat. Process equipment requires low-temperature water cooling. Even in winter, air conditioning is still needed for cooling. In order to meet these requirements. A water cooling circulation system must be built. Water cooling circulation systems are divided into two categories: open systems and closed systems.

Composition and working principle of water cooling circulation system

The water cooling circulation system consists of the following parts: chiller, pump, heat exchanger, water tank, filter, and process equipment.

Chiller: Provides cold source for cooling water system.

Water pump: pressurizes water to ensure its circulation in the cooling system.

Heat exchanger: This device is used to exchange heat between the chilled water system and the cooling water system. To transfer the heat generated at the load end of this system to the chilled water system. There are many types of heat exchangers, which can be divided into shell-and-tube type, plate type, plate-fin type, heat pipe type, etc. In comparison, plate heat exchangers have the advantages of small footprint and large heat transfer area. Taking into account the space and cost characteristics of semiconductor factories, equipment with a small footprint is preferred to save land area and project costs.

Water tank: The water tank in the open system mainly serves to supplement the water source. The water tank in the closed system needs to choose an expansion tank. The expansion water tank has three functions. One is to accommodate and compensate for the expansion and contraction of water in the system; the other is to provide stable pressure to the closed circulating water system. It plays the role of system voltage stabilization; third, it serves as an instruction for the system water replenishment pump. Usually the expansion tank sends a signal to start or shut down the system water replenishment pump.

Filter: Filter out solid impurities in the water and purify the water source.

There are two relatively independent systems of chilled water and cooling water in the water cooling circulation system. Chilled water is provided by the chiller. The chilled water exchanges heat with the cooling water to cool down the cooling water and thereby reduce the temperature of the equipment. Water is pumped from the production equipment through the water pump to the heat exchanger to ensure the temperature of the process cooling water by controlling the amount of chilled water. After passing through the filter, it is sent to the production line equipment, and then returned to the water pump to form a repeated cycle of process cooling water, and the chilled water is directly returned to the chiller.

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