Process Liquid Chillers

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Process liquid chillers are indirect cooling devices used for key equipment in semiconductor, microelectronics and other industries. Divided into open system and closed system.

The application range of process liquid chillers is very wide, involving all aspects of industrial production, including semiconductors, microelectronics, industrial refrigeration machines, steam turbine exhaust condensation in thermal power plants, large central air conditioners, coal chemical industry, petrochemical plants, natural gas pipeline cooling, etc. A large amount of process cooling water is used in all places. In many product or process production environments, clean workshops are required. The temperature and relative humidity in the workshop are required to be maintained within a certain range throughout the year. Some of the production processes generate large amounts of heat, and process equipment requires low-temperature water cooling. Even in winter, air conditioning is still required for cooling. , in order to meet these requirements, process liquid chillers must be built, which are divided into two categories: open system and closed system.

The composition and working principle of process liquid chillers

Process liquid chillers consist of the following parts: chillers, pumps, heat exchangers, water tanks, filters, and process equipment.

Chiller: Provides cold source for cooling water system.

Water pump: pressurizes water to ensure its circulation in the cooling system.

Heat exchanger: This equipment is used to exchange heat between the chilled water system and the cooling water system to transfer the heat generated at the load end of the system to the chilled water system. There are many types of heat exchangers, which can be divided into shell-and-tube type, plate type, plate-fin type, heat pipe type, etc. In comparison, plate heat exchangers have the advantages of small floor space and large heat transfer area. Considering the space and cost characteristics of semiconductor factories, equipment with small floor space is preferred to save land area and project cost.

Water tank: The water tank in the open system mainly serves to supplement the water source. The water tank in a closed system needs to choose an expansion water tank. The expansion water tank has three functions. One is to contain and compensate for the expansion and contraction of water in the system; the other is to provide stable pressure to the closed circulating water system and stabilize the system pressure; The third is as an instruction for the system water replenishment pump, usually the expansion tank sends a signal to start or shut down the system water replenishment pump.

Filter: Filter out solid impurities in the water and purify the water source.

The process liquid chillers system has two relatively independent systems: chilled water and cooling water. The chilled water is provided by the chiller. The chilled water exchanges heat with the cooling water to cool down the cooling water and thereby reduce the temperature of the equipment. Water is pumped from the production equipment through the water pump to the heat exchanger to ensure the temperature of the process cooling water by controlling the amount of chilled water. After passing through the filter, it is sent to the production line equipment and then returns to the water pump. The process cooling water is circulated repeatedly. Chilled water is returned directly to the chiller.

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