Industrial Process Chiller For Semiconductor

Industrial Process Chiller For Semiconductor

In the component industry, the requirements for semiconductors and chips are relatively high. The process cooling Chiller can test the performance of components in different environments, and there is also a different temperature test and other performance tests in packaging and assembly production.

The semiconductor-specific temperature control device developed by our company is also called process cooling Chiller. It is mainly used to accurately control the temperature of the reaction chamber in the semiconductor manufacturing process. It is mainly composed of a heat exchanger, circulating pump, compressor and control system. A self-balancing The circulation device belongs to the temperature control equipment in the production process.

The temperature control accuracy of the process cooling Chiller is better than ±0.3°C, and it can be switched at any working condition from -85°C to 250°C, with good temperature followability; the equipment has a fault self-diagnosis function, and when the equipment fails, it will alarm in time and display on the touch screen Above; fully enclosed pipeline design, fuzzy PID control algorithm, with cascade control algorithm, the temperature difference between the outlet temperature of the heat transfer oil and the external temperature sensor can be set and controlled.

Process cooling Chiller is mainly used in temperature shock and temperature cycle tests of chips, high and low temperature cycle tests of chips, fatigue failure tests, performance tests of chips, modules, integrated circuits, electronic components, etc., reliability analysis, etc.

Custom Chillers                                                                                                                  

Low Temperature Chillers (Custom Designs)

We specialize in the production of low-temperature chillers with a temperature control range as low as -150°C, which can meet the refrigeration needs of different industries.

Recirculating Chillers (Custom Designs)

Our recirculating chiller adopts low-temperature refrigeration technology, the temperature is as low as -120℃, and various accessories are customizable.

Room Temperature Chillers / Small Chillers (Custom Designs)

The chiller can be widely used in various industries and laboratories, and supports customized design.

Chillers for Automotive Battery Test (Custom Designs)

Temperature simulation for vehicle quality test: battery life test, fuel injector/motor test bench, airbag test, component test bench, etc.

Temperature / Pressure / Flow can be independently controlled.

1&2: one machine for two groups control.

Temperature remains constant, pressure / flow can be independently controlled.

1&3: one machine for three groups control.

1&6: one machine for six groups control.

Semiconductor Chillers (TES series) (Custom Designs)

Suitable for precise temperature control of electronic components. In the manufacture of semiconductor electronic components for harsh environments, the IC packaging assembly and engineering and production testing phases include electronic thermal testing and other environmental testing simulations.

Semiconductor Chillers (LTS series) (Custom Designs)

Suitable for precise temperature control of electronic components. In the manufacture of semiconductor electronic components for harsh environments, the IC packaging assembly and engineering and production testing phases include electronic thermal testing and other environmental testing simulations.

Chillers for Energy Storage(Custom Designs)

Liquid Cooling Solutions For Battery Energy Storage Systems

Screw Chillers (Custom Designs)

Low temperature screw chillers and room temperature screw chillers