LTS -80℃までの冷却・加熱装置（フッ化物

Widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium. Use high-quality magnetic pump without mechanical shaft seal. Enhance the design of circulating pump capacity to meet the high-lift requirements of the system.Continuous high temperature cooling technology meets the requirements of stable operation when heat is loaded on the heat sink plate and requires constant temperature control of cooling and heating. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.