Detailed Description

Widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

1. The pressure holding test of the medium circulation system is 7 bar.

2. Use high-quality magnetic pump without mechanical shaft seal.

3. Optimize temperature sampling and response speed, specially designed control algorithm, can respond quickly to stable temperature control.

4. Enhance the design of circulating pump capacity to meet the high-lift requirements of the system.

5. Continuous high temperature cooling technology meets the requirements of stable operation when heat is loaded on the heat sink plate and requires constant temperature control of cooling and heating.

6. In view of the volatile characteristics of fluorinated liquid, the joint design and system sealing design are strengthened to ensure the service life of the medium.

Product Parameters (All products can be customized)

Model	LTS-606
	LTS-606W
Temperature range	-60℃～-20℃
Temperature control accuracy	±0.1℃ -60℃～-30℃
Flow control	12～45L/min
	The flow control adopts frequency converter adjustment, and the speed is automatically adjusted according to the feedback signal of the flow sensor. The maximum pressure of the circulating pump is 5bar.
Internal circulating fluid volume	8L
Expansion tank volume	15L
System pressure display	The pressure of the refrigeration system is realized by a pointer pressure gauge (high pressure, low pressure)
	The pressure acquisition outlet position of the circulatory system is detected by a pressure sensor and displayed on the touch screen
Controller	Siemens PLC, fuzzy PID control algorithm, with cascade control algorithm
Temperature control	Heat transfer medium outlet temperature control mode
	External temperature sensor: (PT100 or 4～20mA or communication setting) control mode (cascade control)
Letter of agreement	Ethernet interface TCP/IP protocol
	RS485 interface modbus RTU protocol
Internal temperature feedback of equipment	Equipment heat transfer medium outlet temperature, medium inlet temperature, refrigeration system condensation temperature, ambient temperature, compressor suction temperature, cooling water temperature (available for water-cooled equipment)
Closed circulation system	The whole system is a fully enclosed system, low temperature does not absorb moisture in the air, does not volatilize the heat transfer medium, and the low temperature automatically supplements the heat transfer medium into the circulation system
Compressor	Emerson Copeland/Danfoss Scroll Flexible Compressor
Circulating pump	German brand magnetic circulation pump
Evaporator	Adopt Danfoss/Gaoli plate heat exchanger
Condenser	Micro channel condenser (air-cooled)
	Plate heat exchanger (water-cooled), special attention: clean factory water is required
Refrigeration accessories	Danfoss/Emerson accessories (filter drier, oil separator, high and low pressure protector, expansion valve)
Operation panel	Wuxi Guanya customized 7-inch color touch screen, temperature curve display\EXCEL data export
Security	With self-diagnosis function; phase sequence open-phase protector, refrigerating machine overload protection; high-pressure pressure switch, overload relay, thermal protection device and other security functions.
In and out interface size	G3/4

About Us

LNEYA attends various exhibitions at home and abroad every year. At the exhibition, we show the latest research equipment of LNEYA. Every year, long-term cooperative customers will come to exhibitions and communicate with us. We are also actively developing new customers to provide them with high quality machines and services.

After sale service

Quality assurance

Guarantee that the goods are sold to be conform to the provisions of the contract and qualified new products by factory inspection, quality performance, technical indicators and configured are in accordance with manufactures and technical documents stipulated in the contract.

Installation and debugging

After the arrival of the goods, my company or my company agent is responsible for installation and debugging of equipment need on-site installation and debugging.

Inspection and acceptance

After installation and debugging, acceptance by the customer to confirm the goods to be conform to the provisions of the contract and qualified new products, quality performance, technical indicators and configured are in accordance with manufactures and technical documents stipulated in the contract, and after the confirmation of a full set of technical documents, sign the installation acceptance report and confirm acceptance.

Training

At the same time of installation and debugging of equipment, my company’s after-sales service engineer is responsible for technical training for user until user can be skilled of operation. In the process of using equipment by customer, customer can consult relevant technical issues to after-sales service personal of our company at any time, according to the situation, my company will arrange training on site or remote.