Temperature Control System for Semiconductor Chip Manufacturing

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Semiconductors are the core of modern electronic technology and are widely used in computers, communications, energy and other fields. However, the performance and life of semiconductor devices are affected by temperature. Too high or too low temperatures can cause device failure or even damage. Therefore, it is crucial to design an efficient and reliable semiconductor temperature control system.

The semiconductor temperature control system mainly consists of three parts: sensor, controller and actuator. The sensor is responsible for measuring the temperature, and the controller controls the actuator to achieve appropriate temperature regulation based on the measurement results. Among them, the accuracy and response speed of the sensor directly affect the performance of the entire system.

Currently, there are two main types of commonly used semiconductor temperature control systems: ordinary PID control and model predictive control. Ordinary PID control is a classic feedback control method with the advantages of simple implementation, stability and reliability. However, in complex nonlinear systems, its adjustment accuracy and response speed are limited. In contrast, model predictive control relies on modeling and prediction of system dynamic characteristics, and has better control accuracy and response speed. However, model predictive control requires more computing resources and higher controller design requirements.

No matter what control method is used, semiconductor temperature control systems face some common challenges. First, the signal transmission between the sensor and the controller must be fast and stable to ensure timely and accurate response to temperature changes. Secondly, the design and selection of the actuator directly affects the regulation effect and energy consumption. Finally, for large-scale semiconductor production lines, automation and remote monitoring are needed to improve production efficiency and reduce labor costs.

In practical applications, various improvements and optimizations can be made to the semiconductor temperature control system according to different usage scenarios and needs. For example, add filters or signal amplifiers to improve signal transmission quality; adopt multi-level control strategies to enhance system robustness and fault tolerance; use intelligent algorithms or machine learning technology to achieve adaptive control and optimal adjustment.

Semiconductor temperature control system is an indispensable part of modern electronic technology and has important application value and research significance. With the advancement of science and technology and the continuous improvement of application requirements, semiconductor temperature control systems will face more challenges and opportunities and require continuous innovation and optimization to meet future development needs.

We provide complete temperature control systems design and manufacturing. From standard models to complete customized products up to 900 tons. We specialize in customer service and are dedicated to helping each customer have the optimal temperature control system for their specific need.

We provide non-standard customized solutions. Both single cooling chillers and cooling & heating combo units are available.

Email: info@lneya.com    WeChat ID: +8615251628237    WhatsApp: +86 17851209193

TES Series (Custom Designs)

Suitable for precise temperature control of electronic components. In the manufacture of semiconductor electronic components for harsh environments, the IC packaging assembly and engineering and production testing phases include electronic thermal testing and other environmental testing simulations.

LTS Series (Fluorinated Liquid) (Custom Designs)

Widely used in the semiconductor manufacturing process to control the temperature of the reaction chamber, the temperature of the heat sink, and the temperature control of the non-flammable fluid of the heat transfer medium.

FLT Series (Custom Designs)

The semiconductor temperature control system chiller is mainly used for precise temperature control in the semiconductor production process and testing process. It is specially developed and designed for the semiconductor industry.

FLTZ Series Frequency Conversion (Custom Designs)

Double frequency conversion series temperature control system, circulation pump and compressor are all adjusted by frequency conversion.

ETCU Series (Custom Designs)

Heat exchange type

System without compressor

ZLFQ Series (Custom Designs)

Coolant Distribution Unit

Liquid cooling equipment is suitable for semiconductor testing, electronic equipment constant temperature testing, cooling server supporting infrastructure, and other fluid temperature control places.

MD Thermal Chucks Series (Custom Designs)

It is used for testing RF devices and high-density power devices (IGBTs and MOSFETs), and can also be used for rapid cooling of laboratory flat panels (plasma, biological products, batteries), etc.

Gas Temperature Control Systems                                                               

AES Series Jet Impact Testing Machine

(Custom Designs)

Temp Control Range: -120°C ~ +225°C

AI Series Recirculating Air Temperature Control System

(Custom Designs)

Temp Control Range: -105°C ~ +125°C

LQ Series Gas Refrigeration System

(Custom Designs)

Temp Control Range: -110°C ~ -40°C

YQH Series VOCs Waste Gas Condensation Recovery Device

(Custom Designs)

Applied to gas condensation liquefaction recovery. The exhaust gas or other electronic gases are connected to the equipment through the induced draft fan (vacuum pump), liquefied, collected and separated into the collection tank by lowering the temperature, and other gases are discharged, so as to realize the condensation, capture and recovery of the gas.

ZLJ / SLJ Series (Custom Designs)

It is suitable for places where the heat exchange area of the heat exchanger is small but the heat exchange capacity is large. It can also be used for gas capture, the refrigerant is directly passed into the trap to evaporate, and the gas in the space is quickly captured through the condensation effect on the surface of the trap.